A Long Pulse Discharge Excited ArF Laser
نویسندگان
چکیده
An X-ray preionised, discharge excited ArF excimer laser, = 193 nm, has been studied in the long pulse regime. The laser performance is found to be primarily dependent on the discharge stability, and therefore, on the gas composition, preionization timing and the pumping power. Using X-ray preionization and prepulse-mainpulse excitation, laser pulselengths of up to 120-ns full-width at half-maximum at 4 mJ/` are obtained by decreasing the partial pressures of the active ingredients, F2 and Ar, and using Ne as a buffergas. This is almost six times as long as usual for discharge excited ArF lasers.
منابع مشابه
Temporal extension of stable glow discharges in fluorine-based excimer laser gas mixtures by the addition of xenon
The effect of addition of xenon on the long term homogeneity of discharges in F2 and ArF excimer laser gas mixtures was investigated in a small-volume discharge chamber. The gas mixture in the discharge chamber was preionized by X-rays. A special electrical excitation circuit containing a pulse forming line provided a long, squareshaped current pumping pulse of a predetermined duration to the d...
متن کاملFemtosecond gain characteristics of the discharge-pumped ArF excimer amplifier.
The gain characteristics of a discharge-pumped ArF excimer amplifier are measured with ~700-fs-long pulses. The small-signal gain and saturation energy are found to be 0.17 cm(-1) and 3.65 +/- 0.15 mJ/cm(2), respectively. The maximum output energy density extracted from the deeply saturated amplifier is as much as 10 mJ/cm(2). The demonstrated femtosecond gain characteristics of ArF indicate th...
متن کاملLaser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures
Spatial and temporal gain profiles as well as the peak net gain at 193 nm have been measured in X-ray preionized discharges excited by a single pulse electrical system working in the charge transfer mode. Arand F2-containing laser gas mixtures with He or Ne as a buffer gas have been used. With a pumping pulse duration of ∼ 100 ns (FWHM) and a specific peak power deposition of ∼ 1 MW cm−3 bar−1 ...
متن کاملLong-pulse KrCl laser with a high discharge quality
The discharge quality and optimum pump parameters of a long-pulse high-pressure gas discharge excited KrCl laser are investigated. A three-electrode prepulse–mainpulse excitation circuit is employed as pump source. The discharge volume contains a gas mixture of HCl/Kr/Ne operated at a total pressure of up to 5 bar. For a plane–plane resonator, the divergence of both output laser beams is measur...
متن کاملInfluence of Interface Thermal Resistance on Relaxation Dynamics of Metal-Dielectric Nanocomposite Materials under Ultrafast Pulse Laser Excitation
Nanocomposite materials, including noble metal nanoparticles embedded in a dielectric host medium, are interesting because of their optical properties linked to surface plasmon resonance phenomena. For studding of nonlinear optical properties and/or energy transfer process, these materials may be excited by ultrashort pulse laser with a temporal width varying from some femtoseconds to some hund...
متن کامل